| 04_knowledge_base/基板 | 33 |
| 04_knowledge_base/EUV | 25 |
| 04_knowledge_base/微影製程 | 16 |
| 04_knowledge_base/Semiconductor Fab | 12 |
| 02_companies/ASML | 11 |
| 04_knowledge_base/Overlay | 8 |
| 02_companies/2330 台積電 | 7 |
| 04_knowledge_base/Multi-Patterning | 7 |
| 04_knowledge_base/2nm | 6 |
| 04_knowledge_base/矽晶圓 | 6 |
| 02_companies/INTC | 5 |
| 04_knowledge_base/Self-aligned double patterning | 5 |
| 04_knowledge_base/Coolant Distribution Unit (CDU) | 4 |
| 04_knowledge_base/5nm | 4 |
| 04_knowledge_base/DUV | 3 |
| 02_companies/Aligned Data Centers | 3 |
| 04_knowledge_base/Line-edge roughness | 3 |
| 04_knowledge_base/Transistor | 3 |
| 04_knowledge_base/Etching | 3 |
| 02_companies/IBM | 2 |
| 04_knowledge_base/Deposition | 2 |
| 04_knowledge_base/Photoresist | 2 |
| 04_knowledge_base/Process node | 2 |
| 04_knowledge_base/Contact | 2 |
| 04_knowledge_base/Via | 2 |
| 03_industries/Foundry | 2 |
| 04_knowledge_base/Intel 18A | 1 |
| 04_knowledge_base/Intel 14A process node | 1 |
| 04_knowledge_base/AI Accelerator | 1 |
| 04_knowledge_base/PDK | 1 |
| 04_knowledge_base/Tapeout | 1 |
| 04_knowledge_base/SiGe | 1 |
| 04_knowledge_base/Critical Dimension Uniformity | 1 |
| 04_knowledge_base/Standard cell | 1 |
| 04_knowledge_base/7nm | 1 |
| 04_knowledge_base/High Aspect Ratio | 1 |
| 04_knowledge_base/Edge Placement Error | 1 |
| 04_knowledge_base/Stochastic Defect | 1 |
| 04_knowledge_base/Hard Mask | 1 |
| 04_knowledge_base/Hyper-NA | 1 |
| 04_knowledge_base/Self-assembly | 1 |
| 04_knowledge_base/Feature Size | 1 |
| 04_knowledge_base/Backside Power Delivery | 1 |
| 04_knowledge_base/Line Space | 1 |
| 04_knowledge_base/ArFi | 1 |
| 04_knowledge_base/Optical Proximity Correction | 1 |
| 04_knowledge_base/Reticle | 1 |
| 04_knowledge_base/Pattern Shaping | 1 |
| 04_knowledge_base/Design Rule | 1 |
| 04_knowledge_base/Logic Process | 1 |
| 04_knowledge_base/Line Width Roughness | 1 |
| 04_knowledge_base/Synchrotron | 1 |
| 04_knowledge_base/Transistor Density | 1 |
| 04_knowledge_base/Aspect Ratio | 1 |